ブックタイトル佐藤真空真空装置2017

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佐藤真空真空装置2017

真空成膜装置Vacuum Coater EquipmentOutline of Deposition Equipment [Kit]1. Chamber Unit: Chamber, Gate valve, Sputtering source (or evaporation source or plasmasource), Viewport, Specimen stage (Optional: Heating or cooling, RF application)2. Evacuation Set: Oil-sealed rotary pump, Turbo-molecular pump(or Oil diffusion pump + Valve),Stand, etc.3. Vacuum piping: (with Gauge port, Vent valve, and Gas injection port)4. Vacuum gauge 1: Pirani vacuum gauge5. Vacuum gauge 2: Hot cathode ionization gauge (B-A gauge)6. Vacuum gauge 3: Diaphragm vacuum gauge7. Power supply unit: DC power supply for sputtering(or RF power supply for sputtering+ Matching box or Resistance heating power supply)8. Gas injection unit: Mass flow controller (or Needle valve set)9. Specimen transfer robot (manually operated)10. Load lock and transfer chamber: Covers (for chamber interface, four or six chambers),Roughing valve, Vent valve, StandChamber UnitSputter SourceEvaporation SourceEtc.Evacuation, ViewPort and others onboth sidesGate Valve 100 mm wide180180200Specimen StageSchematic of System ConfigurationRF PowerSupplyExpanded ChamberEvaporationPowerSupplyDC PowerSupplyGas SystemVacuum PipingEvacuation SetLoad LockTransfer ArmVacuumGauge39