ブックタイトル佐藤真空真空装置2017

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佐藤真空真空装置2017

真空熱処理炉(焼入・焼結・焼鈍)Vacuum Furnaces (Quenching, Sintering, Annealing)“VHF”SeriesTemperature Range and System ConfigurationClassificationHeating TemperatureControl SensorMaterial of Heater(Heating Method)Very High Temperature1400℃to 2300℃Radiation ThermometerCarbon HeaterMetal Heater (W, Mo) *1High Temperature (1)1000℃to 1500℃Platinum_rhodiumThermocouple(Type S, R, and B)Carbon HeaterMetal Heater (Mo, SiC) *1High Temperature (2)700℃to 1100℃Chromel / AlumelThermocouple(Type K)Kanthal Wire Heater*1) Mo: Molybdenum, W: Tungsten, SiC: Silicon carbideCooling■Natural cooling, gas cooling, oil cooling, etc., are used for the cooling of furnaces. Whenrapid cooling in a short time period is required, a separate cooling chamber may be provided.Evacuation System of the Vacuum Furnace■Configuration of the vacuum pump must be selected according to the purpose of theapplication and pressure range of the vacuum furnace. When cleanliness is required, the drypump, dry pump + turbo-molecular pump, or cryo pump should be used.Pressure Range (Degree of Vacuum) and the Vacuum PumpPressure (Pa)*Atmos.~3.0Atmos.~101000~0.43~1 X 10 ?3Vacuum PumpOil-sealed Rotary PumpDry PumpMechanical Booster + Oil-sealed Rotary PumpOil diffusion pump + Oil-sealed rotary pump200~2 X 10 ?5Turbo-molecular pump + Dry Pump orTurbo-Molecular Pump + Oil-sealed Rotary Pump40~10 ?7Cryo Pump + Dry Pump orCryo Pump + Oil-sealed Rotary Pump※) Pressure (degree of vacuum) means the pressure within the chamber and the reason why it is higher than the pressureat the pump inlet is the pipe resistance and emission of gases within the chamber.Operation■After the workpiece is set up in the equipment, full-automatic operation where evacuation,heating, cooling, and return to atmospheric pressure are automatically made and manualoperation where each stage of the operation must be controlled manually can be selected.■The control mode for the heating temperature can be selected from a simple setting of theheating temperature and programmable control where the setting of the heating temperature,heating period etc. is possible.■PID control is employed for temperature control.■Safety circuit: Heating Stop or Complete Shutdown is activated by detecting heateroverheating, low cooling water level, vacuum pressure not normal, etc.30