ブックタイトル佐藤真空真空装置2017

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佐藤真空真空装置2017

Type and Construction of Vacuum Furnaces■Materials of the heater, temperature control sensors, and construction / material of thechamber of the equipment heated in vacuum are different depending on the temperature range.Classification by Type真空熱処理炉(焼入・焼結・焼鈍)Vacuum Furnaces (Quenching, Sintering, Annealing)“VHF”SeriesTypeⅠ: Intemally Heated,CarbonTypeⅡ:Intemally Heated,Metal,etc.TypeⅢ:Externally HeatedModelVHF-Ⅰ(C)VHF-Ⅰ(M)VHF-EHeatingTemperatureRangeVery High Temperature, HighTemperature (1), High Temperature (2)700~2300℃Very High Temperature,High Temperature (1)1000~2300℃High Temperature (1),High Temperature (2)700~1600℃HeaterMaterialHard CarbonMetal Heater(Tungsten, Molybdenum, Silicon carbide)Metal Heater(Kanthal wire, Silicon carbide)ChamberMaterialStainless Steel SUS304(With cooling water jacket)Stainless Steel SUS304(With cooling water jacket)Furnace Core Tube・Alumina tube (~1600℃)・Quartz glass tube (~1200℃)Water cooledelectrodeWater cooledelectrodeHeaterlead wireHeaterplateHeaterplateHeatinsulationHeaterConstructionCoolingwater: OutCoolingwater: OutCoolingwater:InHeatinsulation: CarbonCoolingwater:InShieldplateCoverProcessing areaProcessing areaFurnace core tube■Carbon (Type I) and Metal (Type II) heater materials are used. While carbon material is lessexpensive, it produces very fine particles, so metal type heaters are used for applicationswhere cleanliness is required. In the case of high-temperature range (2) where the temperatureis relatively low, less expensive Kanthal wire or silicon carbide may be used (Type III).■In the very high temperature range and high temperature (1) range, the chamber frequentlyneeds to have a dual wall structure of stainless steel with a cooling water jacket provided(Types I and II) for safety reasons due to the high temperature of the heated zone.■For smaller equipment, Type III (tube furnace) can be used. The material of the chamber iseither an alumina tube or a quartz glass tube, and the effective area of the furnace becomescylindrical.■The radiation thermometer is used in very high temperature ranges because directmeasurement with the sensor inserted into high temperature areas is impossible. The Type Kthermocouple (Chromel / Alumel) can be used for high temperatures in the range of 700℃to1100℃(high temperature (2)) and Types S, R, and B thermocouples (platinum or platinum_rhodium alloy) can be used for high temperatures in the range of 1000℃to 1500℃(hightemperature (1)) inserted directly into the area at high temperature.29