ブックタイトル佐藤真空真空装置2017

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佐藤真空真空装置2017

真空乾燥装置・真空ベーキング装置Vacuum Drying Oven/Vacuum Baking EquipmentDH“Fairy”SeriesApplicationsThe DH Series is widely used in production line processes, including vacuum baking ofsemiconductor components and components for precision/electronic devices, electronicmaterials, metals, ceramics, laser device components, and plasma electrodes.Specifications for DH SeriesTypesStyleDH-□DPDH-□TPHeatingCoolingExhaust system: Oil-sealed rotary vacuum pump and Oil diffusion pumpExhaust system: Oil-sealed rotary vacuum pump and Turbo-molecular pumpInternal heating system (shelf boards or internal surfaces)Vacuum cooling, N2 forced circulation cooling (option)Maximum temperature range 300℃to 650℃PerformanceUltimate pressureInterior/ExteriorDoor/Sealing materialHeat insulating materialDH-□DP: x10 ?3 Pa (after bakeout at no-load normal operating temperature)DH-□TP: x10 ?4 Pa (after bakeout at no-load normal operating temperature)Polished stainless steel (SUS304)/Coated rolled steelSingle-swing door opening: clamp latch/Viton O-ringsAlumina-silica blankets/Flanges and door O-ring section: water-cooling tubes providedConfigurationHeating systemTemperature control systemVacuum exhaust system *1Vacuum gaugeControl panel *2OperationOperating statusInternal heater panels(incorporated into the shelf boards or mounted on the inner wall surfaces; sheath heaters provided )Programmable temperature controller or Fixed temperature controller: PID controlOil-sealed rotary vacuum pump and Oil diffusion pump: DH-□DPOil-sealed rotary vacuum pump and Turbo-molecular pump: DH-□TPBA gauge (ionization vacuum gauge), Pirani vacuum gauge, Digital compound pressure gaugeIncorporated into the stand or stand-aloneAutomatic/Manual, switch-selectableDisplay of device system on the graphic panel, display of device ON/OFF statusDisplayTemperatureLED digital displayOperationTemperature patternsVacuum exhaustProgrammable temperature controller: 30 patterns, 300 segmentsSequencer program used for automatic operationFunctionsHeating/Cooling *3Fixed operation: automatic operation at the specified temperature/start of cooling at the specifiedtimer settingProgrammed operation: heating/cooling as specified by the input patternSafety device: InterlockVacuum exhaust malfunction, Overheating prevention, Motor overload, A drop in the amount ofcooling water, A drop in the operating air pressure, Earth leakage breakerPower supply3φ200V 50/60HzStandards Cooling water Equipment inlet: At least 0.2 MPa 30 to 60 L/minAirEquipment inlet: At least 0.5 MPaOptionsWS Series oil cleaner, Cold trap*1. A cryopump can be used for high-vacuum exhaust.*2. Control panel: Incorporated into the stand if the inner volume is 1m 3 or less;stand-alone if the inner volume is 1.2m 3 or greater.*3. Fixed temperature control: An external timer (located on the control panel) is used to specify the duration for which the specified temperatureis maintained. The cooling process starts when the specified duration elapses.*We can manufacture custom models to specifications.20